Analytical and high resolution transmission electron microscopes and EDS analysis
MFA, KFKI Campus, Building 26.
Contact: Lajos Tóth, tothl @ mfa.kfki.hu

Philips CM20 TEM :


Analytical TEM with side entry goniometer, working at 200 kV
(installed in 1990)
• 0.27 nm point to point resolution
• Versatile range of imaging and diffraction techniques available (SAED, microdiffraction, CBED)
• Nanoprobe X-ray microanalysis (EDS) with NORAN Voyager analyser (Z = 5 – 92)
• Special in situ investigations in heating/cooling holders
• On-line measurements of images and diffraction patterns
• User friendly computer control for easy change of modes of operation.
• Image intensified CCD-camera and monitor system for quick alignment

Specimen holders available for the Philips CM20 microscope :
• Single tilt holder (Philips), X-tilt range: ±45°
• Rotation holder (Philips), X-tilt: ±45°, rotation: 360°
• Double tilt analytical holder (GATAN), made of low background Be, with X- tilt of ±45° and Y-tilt of ±30°
• Double tilt, analytical, cooling holder (GATAN), same as above but can also be used with liquid nitrogen cooling to reduce specimen contamination
• Heating holder (Philips), with controlled temperature (up to 1000°C)



Atomic resolution TEM with side entry goniometer working at 300 kV
(installed in 2001)
• 0.17 nm point-to-point resolution achieved by UHR pole piece, high stability electronics and vibration-free base
• Side entry goniometer allowing specimen-tilt up to 20 degree (X, Y)
• Single-tilt and double tilt sample holders (JEOL), as well as LN2 cooled double-tilt holder (GATAN)
• EELS analysis and energy filtered imaging with post-column imaging filter (GATAN GIF Tridiem, installed in October 2005)
• Options of image recording: photographic film, imaging plate or slow-scan CCD camera (part of the GIF system)